Chapter 1 Introduction
Chapter 2 Propagation of Acoustic Wave in Crystals
Chapter 3 The Theory of FBAR
Chapter 4 The Deposition and Etching of AIN Film
Chapter 5 The FBAR with Membrane Structure
Chapter 6 Solidly Mounted Acoustic Resonator
Chapter 7 The Applications of FBAR in RF Filters
Chapter 8 The FBAR Excited by Lateral Filed
Chapter 9 High Sensitive Sensors Based on FBAR
Index